Atomic Layer Process Innovation Network
The 9th International Conference „ALD for Industry“ brings together scientists, industry experts and researchers to discuss the development and application of Atomic Layer Deposition (ALD). The conference will take place on March 17-18, 2026 in Eindhoven, Netherlands. Topics of the conference include the latest developments in ALD technology, equipment and applications in the semiconductor industry, … Weiterlesen
Dear Colleagues, On behalf of the organising committee, I am delighted to invite you to the Warwick Atomic Layer Processing (WALP 2025) Workshop, taking place on 22–23 July 2025 at University of Warwick (United Kingdom). WALP 2025 will bring together leading academic and industrial experts from all around the world working at the forefront of atomic layer processing … Weiterlesen
The registration for the 2025 Atomic Layer Process Innovation Network (ALPIN) Workshop is open. We anticipate welcoming up to 100 participants from around the world and look forward to two days of engaging discussions and meaningful collaboration. Talk and poster contributions are very welcome.
This work presents the development and implementation of a low-temperature atomic layer deposition (ALD) process for metallic cobalt thin films. The works are based on a set of five different Co precursors with alkyne ligands.
The 8th International Conference “ALD for Industry” will take place in Dresden at March 11th – 12th, 2025 and aims to connect fundamental science with the industrialization and commercialization of atomic layer deposition (ALD) technology. ALD involves depositing thin film materials and has applications beyond microelectronics, including Li-Ion batteries, photovoltaics, and biomedicine. The annual conference … Weiterlesen
Dear ALPIN Community, we cordially invite you to this year’s the Atomic Layer Process Innovation Network (ALPIN) Workshop. It will take place on September 2–3, 2025 in Gießen, Germany. The event is organized by Dr. Philip Klement and Prof. Sangam Chatterjee at the Institute of Experimental Physics I, Justus Liebig University. The workshop will cover … Weiterlesen
The ASD Workshop was initiated in 2016 to provide a scientific communication channel for the community to learn and exchange about selective deposition with a focus on atomic layer deposition (ALD). It has since offered a forum for open discussions between researchers from academia and industry. The workshop comprises 3 tutorial talks, 8 invited talks … Weiterlesen
Welcome to the ALP workshop at FTME 2025, where we dive into cutting-edge Atomic Layer Processing techniques that are enabling modern microelectronics manufacturing. This workshop will take place on Tuesday, February 11, 2025, as part of the ForLab Microelectronics Symposium at TU Ilmenau. Workshop agenda: 09:00 Welcome (Martin Knaut, TU Dresden)09:05 The current status of … Weiterlesen
This year’s cfaed Summer School “Dresden Microelectronics Academy (DMA’24)” will by steered by Prof. Stefan Mannsfeld and supported by the Dresden companies Bosch, Globalfoundries, Infineon, and X-Fab. The one-week event will take place from 9-13 September 2024.
We present a model for surface coverage during ALD to include precursor desorption from the surface, which leads to incomplete conformality. The model combines existing Knudsen diffusion and Langmuir kinetics methods and includes the Bosanquet formula for gas-phase diffusivity and reaction reversibility.