WALP 2025 Workshop

Dear Colleagues, On behalf of the organising committee, I am delighted to invite you to the Warwick Atomic Layer Processing (WALP 2025) Workshop, taking place on 22–23 July 2025 at University of Warwick (United Kingdom). WALP 2025 will bring together leading academic and industrial experts from all around the world working at the forefront of atomic layer processing … Weiterlesen

Low-temperature ALD of metallic cobalt using the CoCOhept precursor: Simulation-assisted process development for deposition on temperature sensitive 3D-structures

This work presents the development and implementation of a low-temperature atomic layer deposition (ALD) process for metallic cobalt thin films. The works are based on a set of five different Co precursors with alkyne ligands.

ALD for Industry 2025

The 8th International Conference “ALD for Industry” will take place in Dresden at March 11th – 12th, 2025 and aims to connect fundamental science with the industrialization and commercialization of atomic layer deposition (ALD) technology. ALD involves depositing thin film materials and has applications beyond microelectronics, including Li-Ion batteries, photovoltaics, and biomedicine. The annual conference … Weiterlesen

ALPIN Workshop 2025 @ JLU Gießen

Dear ALPIN Community, we cordially invite you to this year’s the Atomic Layer Process Innovation Network (ALPIN) Workshop. It will take place on September 2–3, 2025 in Gießen, Germany. The event is organized by Dr. Philip Klement and Prof. Sangam Chatterjee at the Institute of Experimental Physics I, Justus Liebig University. The workshop will cover … Weiterlesen

Area-Selective Deposition Workshop (ASD2025)

The ASD Workshop was initiated in 2016 to provide a scientific communication channel for the community to learn and exchange about selective deposition with a focus on atomic layer deposition (ALD). It has since offered a forum for open discussions between researchers from academia and industry. The workshop comprises 3 tutorial talks, 8 invited talks … Weiterlesen

ALP-Workshop @ FTME 2025

Welcome to the ALP workshop at FTME 2025, where we dive into cutting-edge Atomic Layer Processing techniques that are enabling modern microelectronics manufacturing. This workshop will take place on Tuesday, February 11, 2025, as part of the ForLab Microelectronics Symposium at TU Ilmenau. Workshop agenda: 09:00 Welcome (Martin Knaut, TU Dresden)09:05 The current status of … Weiterlesen

Modeling the impact of incomplete conformality during atomic layer processing

We present a model for surface coverage during ALD to include precursor desorption from the surface, which leads to incomplete conformality. The model combines existing Knudsen diffusion and Langmuir kinetics methods and includes the Bosanquet formula for gas-phase diffusivity and reaction reversibility.

ALPIN Workshop 2024

Dear ALP-Community, This year’s ALPIN workshop will take place from 24.09. to 25.09.2024 in Jena, organized by Adriana Szeghalmi (Fraunhofer IOF) and Mario Ziegler (Leibniz IPHT). We are delighted to have the following companies as sponsors for this year’s workshop: Workshop program @ 24.09.2024 Time Presenter – Title 12:00 – 13:00 M. Z. – Arrival, registration, … Weiterlesen