Martin Knaut

EFDS ALD for Industry 2024

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The 7th International Conference „ALD FOR INDUSTRY“ will again bridge the gap between fundamental science, industrialization and commercialization of this technology. This event is already establied since 2016 and attracts annually more than 100 participants and numerous exhibitors to visit Dresden. The Conference with Tutorial provides the opportunity to learn more about fundamentals of ALD technology, to get informed about recent progress in the field and to get in contact with industrial and academic partners.

Low temperature atomic layer deposition of cobalt using dicobalt hexacarbonyl-1-heptyne as precursor

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This paper presents the development of an atomic layer deposition (ALD) process for metallic cobalt. The process operates at low temperatures using dicobalt hexacarbonyl-1-heptyne [Co2(CO)6HC≡CC5H11] and hydrogen plasma at temperatures between 50 and 110 °C. X-ray photoelectron spectroscopy measurements could show that the deposited cobalt is in the metallic state and the established process shows a homogeneous coating at the wafer level.

ALPIN workshop 2023 – Student award survey

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Please vote for the best student contribution and the best student paper of this year’s ALPIN workshop. Note: Try to be objective and fair and really choose the best presentation in your opinion (not the person). The prizes for the student awards 2023 are sponsored by ALS Metrology (https://als-metrology.de/) – your partner for in situ … Weiterlesen

EFDS ALD for Industry 2023

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Der diesjährige ALD for Industry Workshop war wie schon in den vergangenen Jahren ein voller Erfolg, dank der EFDS sehr gut organisiert und voller interessanter Vorträge, Diskussionen und Gespräche. Nachfolgend gibt es eine Auswahl an Fotos von der Veranstaltung und wer alle Fotos sehen möchte, kann dies über folgendem Link: https://www.katharinaknaut.com/index.php?seite=archiv&name=2023EFDS Am 21. und 22. … Weiterlesen