Atomic Layer Processing Modelling Workshop

Following the nice discussions at the EFDS „Simulations for ALD“ workshop organized online March 2021, a workshop on modelling atomic layer processes will be held in Linköping, Sweden 15-16 March 2022. The meeting format will be hybrid with possibility to join both on-site and online. We hope to meet you then and discuss state-of-the-art methods and current thresholds to jointly bring the field forward!